ISO 14644-3:2019《洁净室及相关受控环境 第3部分:检测方法》的探讨 ——综述与隔离检测
Discussion on ISO 14644-3:2019 Cleanrooms and associated controlled environments—Part 3: Test methods—Review and segregation test
摘要：
ISO 14644-3“检测方法”是洁净室及相关受控环境系列标准中极为重要的部分。ISO 14644-3:2019是该项标准面世十几年以来的首次修订,新版本除对2005年旧版本中某些繁杂的检测方法进行了订正和修改外,还根据科技发展的需要和工程应用经验,增添了一些检测项目和相关内容。本文对新、旧版本做了较全面的比对和综述,以求对新版本有较多的理解,冀盼能为国内相关标准进行相应修订提供参考。隔离检测是ISO 14644-3:2019新增添的检测项目,本文对其相关概念及具体方法做了简要介绍。
Abstract：
The ISO 14644-3 “testing method” is an important part of the series of standards for cleanrooms and associated controlled environments. ISO 14644-3:2019 is the first revision of this standard since it was issued more than ten years ago. In addition to revising and modifying some complicated test methods in the old version issued in 2005, the new version also adds some testing items and related contents according to the needs of technical developments and application experiences. This article provides a comprehensive comparison and review of the new and old versions, in order to gain a better understanding of the new version and provide some references for the corresponding revisions of relevant domestic standards. The segregation test is a new test item in the new version, and this paper briefly presents its related concepts and specific methods.
Keywords:test method; cleanroom and associated controlled environment; light scattering airborne particle counter; segregation test; containment leak test; supporting test