话说微电子工业洁净室的节能(2) ——空调方案、设备选择和余热利用
Discussion on energy conservation measures of cleanrooms in microelectronics industry (2): Air conditioning scheme,device selection and waste heat utilization
摘要：
节能是促进微电子工业发展的重要推手。本文从“空调方案、设备选择和余热利用”方面介绍了一些实例，漫谈了些许经验。就空调方案、通风系统和设备的合理选择，微电子工业洁净厂房的冷热源综合利用等问题，以工程实践成效为线索给出了一些节能建议。
关键词：微电子工业；洁净室；节能；风机过滤单元；免费取冷
Abstract：
Energy conservation is becoming an important driving force to promote the development of microelectronics industry. This paper presents some examples and talks about some experience from the aspects of air conditioning schemes, device selection and waste heat utilization. Regarding the reasonable selection of air conditioning system, ventilation system and equipment, and the comprehensive utilization of cold and heat sources in the cleanrooms of microelectronics industry, some energy conservation suggestions are provided based on engineering practice effects.
Keywords:microelectronics industry; cleanroom; energy conservation; fan filter unit (FFU); free cooling