电子洁净室气态化学污染环境控制规范分析*
Analysis of gaseous chemical contaminant environmental control standards for electronic cleanrooms
摘要：
针对气态化学污染控制，回顾了电子洁净室环境控制规范的发展历史和主要内容。从污染物分类、洁净等级划分等方面对比了不同国家及不同组织规范的异同，对现行规范进行了对比总结，分析了电子洁净室环境控制规范的特点、发展趋势及存在的不足。对比了电子洁净室环境控制规范与住宅空气质量规范及大气环境规范，总结了洁净室环境控制的特殊性，并对中国洁净室环境控制规范的修订提出了建议。
Abstract：
Reviews the development history and main contents of gaseous chemical contaminant environmental control standards for electronic cleanrooms. Compares the differences and similarities between the standards of different countries and different organizations in terms of contaminants classification and clean grade classification, summarizes the current standards, and analyses the characteristics, development trends and shortcomings of the environmental control standards for electronic cleanrooms. Compares the electronic cleanroom environmental control standard with the indoor air quality standard of buildings and the atmospheric environment standard, summarizes the specifications of the cleanroom environmental control, and puts forward suggestions for the revision of China’s cleanroom environmental control standard.
Keywords:electronic cleanroom, environmental control, standard, airborne molecular chemical contaminant, clean grade classification