某芯片生产厂房净化空调设计
Clean air conditioning design for a chip production plant
摘要：
结合氮化镓功率放大器芯片厂房工程概况与工艺流程，详细介绍了净化空调系统形式、空调负荷计算、净化风量确定、风机过滤器单元及干盘管的布置、灰区回风、新风量的确定及新风处理。阐述了温度、湿度、压差控制系统，给出了相关节能措施。
关键词：净化空调,风机过滤器单元,新风机组,干盘管,自控
Abstract：
Based on the project profile and process flow of a GaN power amplifier chip plant, presents the form of the clean air conditioning system, the calculation of cooling load, the determination of the clean air rate, the arrangement of fan filter unit (FFU) and dry coils, the return air in the grey area, the determination of the outdoor air rate and the outdoor air handling progress in detail. Elaborates the control systems of temperature, humidity and pressure difference, and presents the relevant energy saving measures.
Keywords:cleanairconditioning,fanfilterunit（FFU）,outdoorairhandlingunit,drycoil,automaticcontrol