论集成电路厂房工艺排风的本地处理
Local disposal of process exhaust from integrated circuit workshop
摘要：
在集成电路厂房产品制造过程中会产生有毒有害的工艺废气。由于制造工艺复杂，使用的气体与化学品种类多样，仅使用集中废气处理设备无法高效地去除废气中的各种有害成分。结合工程实例，介绍了集成电路厂房工艺排风本地处理设备的作用、分类、工作原理与选用。采样分析结果表明，设备运行稳定，废气去除效率均高于90%。
Abstract：
The toxic and harmful process industrial waste gas is generated from the product manufacturing process of integrated circuit workshop. Due to the complicated manufacturing process and the various types of gases and chemicals, the harmful ingredients of process air exhaust can not be effectively removed only by central exhaust treatment equipment. With an engineering example, presents the function, category, principle and selection of local treatment equipments for the process exhaust from integrated circuit workshop. Sampling analysis shows that the equipments run stable, and the removal efficiencies are higher than 90%.
Keywords:integrated circuit, process exhaust, local disposal equipment, central treatment, scrubber