某硅晶片生产厂房净化空调设计
Cleaning air conditioning design for a silicon chip workshop
摘要：
结合实例，介绍了洁净室净化空调系统设计原则、气流组织形式、空气处理过程，并讨论了其空调系统的自控问题。
关键词：垂直单向流洁净室,风机过滤单元,变频,自控,干式冷盘管
Abstract：
With an actual example, presents the principle of cleaning air conditioning system design, air distribution forms and air handling processes for clean rooms, and discusses the problem related to control of the air conditioning system.
Keywords:verticalunidirectionalairflowcleaningroom,fanfilterunit,variablefrequency,autocontrol,drycoolingcoil