电子洁净室用化学过滤器性能及其评价方法
Performance and evaluation methods of chemical filters for electronic clean rooms
摘要：
电子洁净室中空气化学污染物会直接影响半导体产品的质量及良品率。化学过滤器的性能及其评价方法对有效控制电子洁净室中的空气化学污染物浓度至关重要。本文研究参考相关标准提供的空气净化装置性能试验方法,对19台电子洁净室化学过滤器进行了性能测试,并分析了不同化学过滤器对酸、碱、挥发性有机化合物(VOC)类空气化学污染物的净化性能。与质量容污量相比,采用摩尔容污量能更好地评价同款双效化学过滤器处理不同污染物时的使用寿命。对某台化学过滤器分别进行了9×10-6、45×10-6、90×10-6不同加载体积分数下的甲苯净化性能测试,结果表明其容污量和持附力随加载浓度降低而下降。此外,同时考虑化学过滤器的净化性能和阻力性能,采用综合能效指标分别对酸、碱化学过滤器进行了性能比较。根据ISO提供的一般通风用空气净化装置的分级方法对电子洁净室化学过滤器的甲苯净化性能进行了分级,所测试化学过滤器均为中级(md),不能对其进行有效区分,未来需要针对此类特殊应用场景建立更精细的化学过滤器分级方法。
Abstract：
The air chemical contaminants in the electronic clean rooms will directly affect the quality and yield of semiconductor products. The performance and evaluation methods of chemical filters are important for controlling the concentration of air chemical contaminants in electronic clean rooms. In this study, performance testing is conducted on 19 chemical filters for the electronic clean rooms with reference to the performance test method for air cleaning devices provided by relevant standards, and the purification performance of different chemical filters for acid, alkali and VOC air chemical contaminants is analysed. Compared with the mass dirt holding capacity, the Molar dirt holding capacity is more effective in evaluating the service life of the same dual-effect chemical filter for treating different contaminants. The purification performance against toluene under different volume fractions of 9×10-6, 45×10-6, 90×10-6is tested respectively on a chemical filter, and the results show that its dirt holding capacity and adhesion decrease with the decrease of loading concentration. In addition, considering the purification performance and resistance performance of the chemical filter, the performance of the acid and alkali chemical filters is compared by using the comprehensive energy efficiency index. According to the grading method for general ventilation air purification devices provided by ISO, the toluene purification performance of chemical filters for electronic clean rooms is classified. The tested chemical filters are all graded as middle rank (md) and cannot be effectively distinguished. In the future, there will be a need for more refined grading methods specifically tailored to chemical filters for such special application scenarios.
Keywords:electronic clean room; chemical filter; performance; evaluation; dirt holding capacity; comprehensive energy efficiency index; grading method