发展高端产业“双碳”环控技术的思路、机理与措施
Ideas, mechanisms and measures for developing dual-carbon environmental control technology in high-end industries
摘要：
高端产业工艺制程不断对高质量的环境控制提出新的要求、新的挑战,引发越来越高的能耗,传统节能降耗措施受到更多的约束,施展的空间更小。“双碳”战略提出了更高要求,本文基于高端产业工艺环境控制的特点与制约因素,介绍了通过多源组合能源提高能源利用效率、改革生产工艺实现高级别微环境与低级别大环境的组合模式、调整实需控制参数与系统解耦实施合理的工艺环境控制、保障工艺制程等方面的典型案例及其理性环控途径,探讨了适合高端产业良性发展的“双碳”环控技术的思路、机理与措施。
Abstract：
High-end industrial processes continue to put forward new requirements and new challenges for high-quality environmental control, leading to higher and higher energy consumption. Traditional energy saving measures are more constrained, and the space for display is smaller. The dual-carbon strategy puts forward higher requirements. Based on the characteristics and constraints of high-end industrial process environmental control, several typical cases and rational environmental control approaches are presented, such as improving energy utilization efficiency through multi-source combination energy, reforming production process to realize combination mode of high-level micro-environment and low-level environment, adjusting actual control parameters and system decoupling control to implement reasonable process environment control, and ensuring process manufacturing process. The ideas, mechanisms and measures of dual-carbon environmental control technology suitable for the healthy development of high-end industries are discussed.
Keywords:high-end industry; process environment; control technology; dual-carbon requirement; countermeasure