垂直单向流洁净室下夹层空气流速与孔板排布规律研究
Study on air velocity and orifice plate arrangement law of lower interlayer in vertical unidirectional airflow cleanrooms
摘要：
提出了基于高架地板下夹层空气流速的量纲一速度参数K1,利用ANSYS Fluent软件对不同洁净室结构形式、风机过滤单元布置率和出口风速等条件下的空态洁净室高架地板布置方式与下夹层空气流速的匹配关系进行了研究。结果表明:当K1<5时,洁净室内宜使用相同规格开孔率的孔板均匀布置;当5≤K1<9时,应优先使用具有一定压力梯度变化的孔板非均匀布置,其次使用低开孔率的孔板均匀布置;当K1≥9时,应使用具有较大压力梯度的孔板非均匀布置,且K1值越大,靠近回风道位置孔板开孔率越小,孔板压力梯度变化越大。
Abstract：
In this paper, a dimensionless velocity parameter K1based on the air velocity of the lower interlayer of an elevated floor is proposed,and ANSYS Fluent software is used to study the matching relationship between the elevated floor perforation arrangement and the air velocity of the lower interlayer in empty cleanrooms under the conditions of different cleanroom structure, fan filter unit layout rate and outlet air velocity. The results show that when K1<5, the orifice plates with the same specification of opening rate should be uniformly arranged in the cleanroom. When 5≤K1<9, the non-uniform arrangement of orifice plates with certain pressure gradient changes should be preferred, followed by the uniform arrangement of orifice plates with low opening rate. When K1≥9, the orifice plates with a large pressure gradient should be non-uniformly arranged, and the larger the K1value, the smaller the opening rate of the orifice plates near the return air duct position, and the greater the pressure gradient change of the orifice plates.
Keywords:cleanroom; unidirectional airflow; orifice plate arrangement; opening rate; air distribution; numerical simulation