ISO 14644-16：2019《洁净室及相关受控环境——第16部分：洁净室和隔离设备的能效》简介*
Introduction of ISO 14644-16：2019 Cleanrooms and associated controlled environments—Part 16: Energy efficiency in cleanrooms and separative devices
摘要：
国际标准化组织（ISO）于2019年5月发布了ISO 14644-16第1版，针对洁净室及隔离设备的节能提出指导和建议，给出了与洁净室节能相关的术语和评价指标，汇总了洁净室节能的各个环节。本文简单介绍了该标准的内容，分析了洁净室节能的各项技术措施。
关键词：ISO,14644-16,简介,洁净室,节能,措施
Abstract：
ISO released the first edition of the ISO 14644-16 in May 2019, giving guidance and recommendations for energy saving in cleanrooms and separative devices, defining several terms and evaluation indicators about energy saving of cleanrooms, and summarizing energy saving opportunities. Presents the content of the standard briefly，and analyses technical measures for cleanroom energy saving.
Keywords:ISO14644-16,introduction,cleanroom,energysaving,measure