Analysis of gaseous chemical contaminant environmental control standards for electronic cleanrooms

Reviews the development history and main contents of gaseous chemical contaminant environmental control standards for electronic cleanrooms. Compares the differences and similarities between the standards of different countries and different organizations in terms of contaminants classification and clean grade classification, summarizes the current standards, and analyses the characteristics, development trends and shortcomings of the environmental control standards for electronic cleanrooms. Compares the electronic cleanroom environmental control standard with the indoor air quality standard of buildings and the atmospheric environment standard, summarizes the specifications of the cleanroom environmental control, and puts forward suggestions for the revision of China’s cleanroom environmental control standard.