Study on performance evaluation methods of chemical filters applied to electronic industry

Zhou Shaoyang1,2, Cao Guoqing1,2, Feng Xin1,2

2023.04.20

The performance parameters of chemical filters are important reference indicators for users to maintain during use. However, the actual use scenarios are complex, which makes it impossible for users to use the performance parameters of chemical filters to reflect their performance when products are sold. Combined with the actual use scenarios of chemical filters, this paper summarizes the problems encountered in the actual use of chemical filters. Combined with the relevant norms and related research on the evaluation of existing chemical filters, the future development direction is given.