Discussion on energy conservation measures of cleanrooms in microelectronics industry (2): Air conditioning scheme,device selection and waste heat utilization

Tu You1, Tu Guangbei2


Energy conservation is becoming an important driving force to promote the development of microelectronics industry. This paper presents some examples and talks about some experience from the aspects of air conditioning schemes, device selection and waste heat utilization. Regarding the reasonable selection of air conditioning system, ventilation system and equipment, and the comprehensive utilization of cold and heat sources in the cleanrooms of microelectronics industry, some energy conservation suggestions are provided based on engineering practice effects.